Specific Process Knowledge/Lithography/Pretreatment: Difference between revisions
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=Pretreatment= | =Pretreatment= | ||
All surfaces can be divided to hydrophilic or hydrophobic surfaces | All surfaces can be divided to hydrophilic or hydrophobic surfaces. Oxidized surfaces such as SiO2 or surfaces with native oxide (e.g. Si or Al substrates) are considered to be hydrophilic and have very bad wetting with hydrophobic resist. The adhesion of most resists on hydrophilic surfaces is deteriorated if moisture is present on the surface. | ||
Therefore it is very important to do the pretreatment step before the spinning. Here we will give an overview of treatments available at Danchip to promote photoresist adhesion. | Therefore it is very important to do the pretreatment step before the spinning. Here we will give an overview of treatments available at Danchip to promote photoresist adhesion. | ||