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| |-style="background:WhiteSmoke; color:black"
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| !Etch rate range
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| *~75 nm/min (Thermal oxide) in BHF
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| *~90 nm/min (Thermal oxide) in SIO Etch
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| *~25 nm/min (Thermal oxide) in 5%HF
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| *~3-4µm/min in 40%HF
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| *Process dependent
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| *Tested range: ~20nm/min - ~120nm/min
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| *Process dependent
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| *Tested range: ~230nm/min - ~550nm/min
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