Specific Process Knowledge/Etch/Etching of Silicon: Difference between revisions
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! ASE | ! ASE | ||
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| | |General description | ||
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*Anisotropic etch in the (100)-plan | *Anisotropic etch in the (100)-plan | ||
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! ASE | ! ASE | ||
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| | |General description | ||
| | | | ||
*Anisotropic etch in the (100)-plan | *Anisotropic etch in the (100)-plan | ||