Specific Process Knowledge/Lithography/Pretreatment: Difference between revisions
| Line 88: | Line 88: | ||
*Silicon Nitride | *Silicon Nitride | ||
*Glass | *Glass | ||
|- | |||
|-style="background:LightGrey; color:black" | |||
!Restrictions | |||
|None | |||
|Wafers with metal is not allowed | |||
|Resist is not allowed | |||
|- | |- | ||
|} | |} | ||