Specific Process Knowledge/Lithography/Pretreatment: Difference between revisions
Appearance
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!Substrate size | !Substrate size | ||
| | | | ||
* 50 mm wafers | |||
* 100 mm wafers | |||
* 150 mm wafers | |||
| | | | ||
bhf | bhf | ||
| Line 61: | Line 61: | ||
!Substrate size | !Substrate size | ||
| | | | ||
* 50 mm wafers | |||
* 100 mm wafers | |||
* 150 mm wafers | |||
| | | | ||
bhf | bhf | ||