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Specific Process Knowledge/Lithography/Pretreatment: Difference between revisions

Taran (talk | contribs)
Taran (talk | contribs)
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!Generel description
!Generel description
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*Isotropic etch
*vapor priming
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*Anisotropic etch: vertical sidewalls
*oxide strip
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*Anisotropic etch: vertical sidewalls
*dehydration
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