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Specific Process Knowledge/Lithography/Strip: Difference between revisions

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DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab307-labadviser-users-34891
3,528 edits
Taran (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab307-labadviser-users-34891
3,528 edits
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|style="background:LightGrey; color:black"|
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|style="background:WhiteSmoke; color:black"|
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*All purposes
All purposes
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|style="background:WhiteSmoke; color:black"|
*Clean wafers only, no metal  
Clean wafers only, no metal  
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|style="background:WhiteSmoke; color:black"|
*III-V materials only
III-V materials only
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|style="background:WhiteSmoke; color:black"|
*Resist strip
Resist strip
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|style="background:WhiteSmoke; color:black"|
*Resist strip
Resist strip


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Solvent
Solvent
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|style="background:WhiteSmoke; color:black"|
Solvent
Solvent and ultra sound


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!style="background:silver; color:black" align="center" valign="center" rowspan="3"|Process parameter range
!style="background:silver; color:black" align="center" valign="center" rowspan="3"|Process parameters
|style="background:LightGrey; color:black"|Process gasses
|style="background:LightGrey; color:black"|Process gasses
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*O<sub>2</sub> (0 - 400 sccm)
*N<sub>2</sub>
*CF<sub>4</sub>
|style="background:WhiteSmoke; color:black"|
|style="background:WhiteSmoke; color:black"|
*O<sub>2</sub>
*O<sub>2</sub>
*N<sub>2</sub>
|style="background:WhiteSmoke; color:black"|
|style="background:WhiteSmoke; color:black"|
*
*O<sub>2</sub>
|style="background:WhiteSmoke; color:black"|
|style="background:WhiteSmoke; color:black"|
*  
*NA
|style="background:WhiteSmoke; color:black"|
|style="background:WhiteSmoke; color:black"|
*
*NA
|style="background:WhiteSmoke; color:black"|
*


|style="background:LightGrey; color:black"|Process power
|-
|style="background:LightGrey; color:black"|Max. process power
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|style="background:WhiteSmoke; color:black"|
*  
*1000 W
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|style="background:WhiteSmoke; color:black"|
*
*1000 W
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|style="background:WhiteSmoke; color:black"|
*
*100%
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|style="background:WhiteSmoke; color:black"|
*
*NA
|style="background:WhiteSmoke; color:black"|
|style="background:WhiteSmoke; color:black"|
*
*NA


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|style="background:LightGrey; color:black"|Solvent
|style="background:LightGrey; color:black"|Solvent
|style="background:WhiteSmoke; color:black"|
|style="background:WhiteSmoke; color:black"|
*
*NA
|style="background:WhiteSmoke; color:black"|
|style="background:WhiteSmoke; color:black"|
*
*NA
|style="background:WhiteSmoke; color:black"|
|style="background:WhiteSmoke; color:black"|
*
*NA
|style="background:WhiteSmoke; color:black"|
|style="background:WhiteSmoke; color:black"|
*
*Acetone
|style="background:WhiteSmoke; color:black"|
|style="background:WhiteSmoke; color:black"|
*
*Acetone


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