Jump to content

Specific Process Knowledge/Etch/Etching of Silicon Oxide: Difference between revisions

← Older editNewer edit →
VisualWikitext
BGE (talk | contribs)
Bureaucrats, danchip, Administrators
2,908 edits
BGE (talk | contribs)
Bureaucrats, danchip, Administrators
2,908 edits
Line 12: Line 12:
{| border="1" cellspacing="0" cellpadding="4" align="center"
{| border="1" cellspacing="0" cellpadding="4" align="center"
!  
!  
! Wet Silicon Oxide etch (BHF)
! Wet Silicon Oxide etch (BHF and SIO Etch)
! RIE
! RIE
! AOE
! AOE
Retrieved from "https://labadviser.nanolab.dtu.dk//index.php?title=Specific_Process_Knowledge/Etch/Etching_of_Silicon_Oxide"