Specific Process Knowledge/Lithography/Pretreatment: Difference between revisions
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|style="background:LightGrey; color:black"|Process time | |style="background:LightGrey; color:black"|Process time | ||
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32.5 | 32.5 minutes | ||
|style="background:WhiteSmoke; color:black" align="center"| | |style="background:WhiteSmoke; color:black" align="center"| | ||
3 min / wafer | 3 min / wafer | ||