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Specific Process Knowledge/Lithography/Pretreatment: Difference between revisions

Taran (talk | contribs)
Taran (talk | contribs)
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82° (on SiO<sub>2</sub>)
82° (on SiO<sub>2</sub>)
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!style="background:silver; color:black" align="center" valign="center" rowspan="3"|Process parameters
!style="background:silver; color:black" align="center" valign="center" rowspan="2"|Process parameters
|style="background:LightGrey; color:black"|Process temperature
|style="background:LightGrey; color:black"|Process temperature
|style="background:WhiteSmoke; color:black" align="center" colspan="2"|
|style="background:WhiteSmoke; color:black" align="center" colspan="2"|
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|style="background:WhiteSmoke; color:black" align="center" colspan="2"|
|style="background:WhiteSmoke; color:black" align="center" colspan="2"|
32.5 minutes
32.5 minutes
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|style="background:LightGrey; color:black"|Process pressure
|style="background:WhiteSmoke; color:black" align="center"|
??
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!style="background:silver; color:black" align="center" valign="center" rowspan="3"|Substrates
!style="background:silver; color:black" align="center" valign="center" rowspan="3"|Substrates