Specific Process Knowledge/Lithography/Pretreatment: Difference between revisions
| Line 106: | Line 106: | ||
[[Specific Process Knowledge/Lithography/Coaters#Spin Track 1 + 2|Specific process knowledge on Spin Track 1 + 2]] | [[Specific Process Knowledge/Lithography/Coaters#Spin Track 1 + 2|Specific process knowledge on Spin Track 1 + 2]] | ||
=== | ===Process information=== | ||
[[Specific Process Knowledge/Lithography/Coaters/Spin Track 1 + 2 processing#HMDS priming|General process information about HMDS priming on Spin Track 1 + 2]] | [[Specific Process Knowledge/Lithography/Coaters/Spin Track 1 + 2 processing#HMDS priming|General process information about HMDS priming on Spin Track 1 + 2]] | ||