Specific Process Knowledge/Etch/AOE (Advanced Oxide Etch): Difference between revisions
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== Etching using the dry etch technique AOE (Advanced oxide etch) == | == Etching using the dry etch technique AOE (Advanced oxide etch) == | ||
[[Image:AOE.jpg|300x300px|thumb|AOE: positioned in cleanroom | [[Image:AOE.jpg|300x300px|thumb|AOE: positioned in cleanroom B-1]] | ||
The AOE can be used for etching silicon oxide, silicon (oxy)nitride and quartz. Look in the manuals for the AOE to see how to operate the machine (you can find the manuals in LabManager on the AOE page). | The AOE can be used for etching silicon oxide, silicon (oxy)nitride and quartz. Look in the manuals for the AOE to see how to operate the machine (you can find the manuals in LabManager on the AOE page). | ||