Specific Process Knowledge/Etch: Difference between revisions
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'''Advantages of dry etch over wet chemistry:''' | '''Advantages of dry etch over wet chemistry:''' | ||
*Anisotropic etch can be done. | *Anisotropic etch can be done. | ||
*The etch does not | *The etch does not attack the backside of the sample. | ||
== Choose material to be etched == | == Choose material to be etched == | ||