Specific Process Knowledge/Characterization/Profiler: Difference between revisions
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[[image:Dektak 8 new position.JPG|275x275px|right|thumb|Dektak 8: positioned cleanroom F-2 (characterization room).]] | [[image:Dektak 8 new position.JPG|275x275px|right|thumb|Dektak 8: positioned cleanroom F-2 (characterization room).]] | ||
Dektak 8 stylus profiler is a product of Veeco Instruments. It is usable for profiling surfaces of samples with structures in the micrometer range. It can measure in a specific point found with help from high magnification video cameras or it can be programmed to measure several points defined with respect to some deskew points. It can also be used for stress measurements of thin films by measuring the wafer bow. | Dektak 8 stylus profiler is a product of Veeco Instruments. It is usable for profiling surfaces of samples with structures in the micrometer range. It can measure in a specific point found with help from high magnification video cameras or it can be programmed to measure several points defined with respect to some deskew points. It can also be used for [[Specific_Process_Knowledge/Characterization/Stress_measurement|stress measurements]] of thin films by measuring the wafer bow. | ||
To get some product information and some tips and tricks from the vendor take a look at Veeco's homepage [http://www.veeco.com/products/details.php?cat=1&sub=6&pid=32] | To get some product information and some tips and tricks from the vendor take a look at Veeco's homepage [http://www.veeco.com/products/details.php?cat=1&sub=6&pid=32] | ||
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*Single point profiles | *Single point profiles | ||
*Wafer mapping | *Wafer mapping | ||
*Stress measurements by measuring wafer bow | *[[Specific_Process_Knowledge/Characterization/Stress_measurement|Stress measurements]] by measuring wafer bow | ||
*Surface roughness on a line scan | *Surface roughness on a line scan | ||
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