Specific Process Knowledge/Thin film deposition/Furnace LPCVD PolySilicon: Difference between revisions
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'''[http://www.labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=291 6" LPCVD polysilicon furnace (E2)]''' | '''[http://www.labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=291 6" LPCVD polysilicon furnace (E2)]''' | ||
==Process | ==Process information== | ||
Please take a look at the process side for deposition of polysilicon using LPCVD: | Please take a look at the process side for deposition of polysilicon using LPCVD: | ||