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== The DRIE Pegasus at Danchip ==
== The DRIE Pegasus at Danchip ==


[[Image:DRIE-Pegasus.jpg |300x300px|thumb|The SPTS Pegasus in the Danchip cleanroom]]
[[Image:DRIE-Pegasus.jpg |300x300px|thumb|The SPTS Pegasus in the Danchip cleanroom A-1]]


'''The Bosch process'''
'''The Bosch process'''
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