Specific Process Knowledge/Characterization/XPS: Difference between revisions
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* Depth profiling possible by ion beam etch of sample | * Depth profiling possible by ion beam etch of sample | ||
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!style="background:silver; color:black" align="left | !rowspan="5" style="background:silver; color:black" align="left"| Performance | ||
|style="background:LightGrey; color:black"|Spot size | |style="background:LightGrey; color:black"|Spot size | ||
|style="background:WhiteSmoke; color:black"|Can be set between 30µm - 400µm | |style="background:WhiteSmoke; color:black"|Can be set between 30µm - 400µm | ||
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|style="background:LightGrey; color:black"|Probing depth | |style="background:LightGrey; color:black"|Probing depth | ||
|style="background:WhiteSmoke; color:black"|Depending on probed element. Max probe depth lies within 10-200 Å. | |style="background:WhiteSmoke; color:black"|Depending on probed element. Max probe depth lies within 10-200 Å. | ||
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|style="background:LightGrey; color:black"|Resolution | |style="background:LightGrey; color:black"|Resolution | ||
|style="background:WhiteSmoke; color:black"|Dependent on probed elements. Concentrations down to about 0,5 atomic % can in some cases be detected. | |style="background:WhiteSmoke; color:black"|Dependent on probed elements. Concentrations down to about 0,5 atomic % can in some cases be detected. | ||
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|style="background:LightGrey; color:black"|Charge compensation | |style="background:LightGrey; color:black"|Charge compensation | ||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
Flood gun can be used for charge compensation of non conductive samples | Flood gun can be used for charge compensation of non conductive samples | ||
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|style="background:LightGrey; color:black"|Finding structures | |style="background:LightGrey; color:black"|Finding structures | ||
|style="background:WhiteSmoke; color:black"|Choose measuring spot from camera image (magnified) | |style="background:WhiteSmoke; color:black"|Choose measuring spot from camera image (magnified) | ||