Specific Process Knowledge/Characterization/AFM: Atomic Force Microscopy: Difference between revisions
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==Nanoman== | ==Nanoman== | ||
[[image:Nanoman.jpg|290x290px|right|thumb|Nanoman: positioned in | [[image:Nanoman.jpg|290x290px|right|thumb|Nanoman: positioned in cleanroom F-2]] | ||
The AFM: Nanoman is a product of Bruker. AFM stands for Atomic Force Microscope which is a scanning probe microscope where a sharp probe is scanned across a surface either in contact mode or tapping mode. The outcome is a topographic plot of the surface. It has a lateral solution of about 1 nm and a vertical resolution of less than 1 Å which makes it very suitable for topographic characterization in the nanometer regime. The limiting factor however is often the size of the probe in use. The tip radius of curvature (ROC) can be from 2 nm up to more than 20 nm depending on the chosen probe. The half cone angle of the tip can vary from less than 3<sup>o</sup> to over 25<sup>o</sup> giving problems resolving high aspect ratio structures. | The AFM: Nanoman is a product of Bruker. AFM stands for Atomic Force Microscope which is a scanning probe microscope where a sharp probe is scanned across a surface either in contact mode or tapping mode. The outcome is a topographic plot of the surface. It has a lateral solution of about 1 nm and a vertical resolution of less than 1 Å which makes it very suitable for topographic characterization in the nanometer regime. The limiting factor however is often the size of the probe in use. The tip radius of curvature (ROC) can be from 2 nm up to more than 20 nm depending on the chosen probe. The half cone angle of the tip can vary from less than 3<sup>o</sup> to over 25<sup>o</sup> giving problems resolving high aspect ratio structures. | ||
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'''The user manual, quality control procedure and results and contact information can be found in LabManager:''' <br/> | '''The user manual, quality control procedure and results and contact information can be found in LabManager:''' <br/> | ||
[http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=125 Nanoman in LabManager] | [http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=125 Nanoman in LabManager] | ||
==Process Information== | ==Process Information== | ||