Specific Process Knowledge/Thermal Process/Furnace APOX: Difference between revisions
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This furnace is positioned in the III-V cleanroom area. Only Danchip employees are allowed to operate the furnace. | This furnace is positioned in the III-V cleanroom area. Only Danchip employees are allowed to operate the furnace. | ||
'''The user manual, technical information and contact information can be found in LabManager:''' | |||
'''[http://www.labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=159 APOX Furnace (C3)]''' | |||
==Process knowledge== | ==Process knowledge== | ||