Specific Process Knowledge/Characterization/SIMS: Secondary Ion Mass Spectrometry: Difference between revisions
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* Acceleration voltage, lens parameters | * Acceleration voltage, lens parameters | ||
* Gas inlet pressures, apertures, | * Gas inlet pressures, apertures, | ||
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|style="background:LightGrey; color:black"| Mass spectrometer parameters | |||
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* Acceleration voltage, lens parameters | |||
* Gas inlet pressures, apertures, | |||
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|style="background:LightGrey; color:black"| Sample position | |||
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* Acceleration voltage, lens parameters | |||
* Gas inlet pressures, apertures, | |||
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!style="background:silver; color:black" align="left" rowspan="3" |Sample requirements | !style="background:silver; color:black" align="left" rowspan="3" |Sample requirements | ||