Specific Process Knowledge/Characterization/SIMS: Secondary Ion Mass Spectrometry: Difference between revisions
Appearance
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!style="background:silver; color:black" align="left"|Performance | !style="background:silver; color:black" align="left"|Performance | ||
|style="background:LightGrey; color:black"|Measurement accuracy depends on | |style="background:LightGrey; color:black"|Measurement accuracy depends on | ||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
* Which atoms to be analysed | * Which atoms to be analysed | ||
* The sample morphology (flat samples are much more suited than particles) | * The sample morphology (flat samples are much more suited than particles) | ||
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!style="background:silver; color:black" align="left"|Process parameters | !style="background:silver; color:black" align="left" rowspan="3"|Process parameters | ||
|style="background:LightGrey; color:black"| | |style="background:LightGrey; color:black"| Ion gun parameters | ||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
* | * Acceleration voltage, lens parameters | ||
* | * Gas inlet pressures, apertures, | ||
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!style="background:silver; color:black" align="left" rowspan="3" |Sample requirements | !style="background:silver; color:black" align="left" rowspan="3" |Sample requirements | ||