Specific Process Knowledge/Thin film deposition/MVD: Difference between revisions
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|style="background:WhiteSmoke; color:black"|Chemical | |style="background:WhiteSmoke; color:black"|Chemical | ||
*Water | *Water | ||
*FDTS (new source) | *FDTS (new source, 2013) | ||
*FDTS (old source, contaminated line) | *FDTS (old source, contaminated line) | ||
*Available (line probably contaminated) | *Available (line probably contaminated, no source heater) | ||
|- | |- | ||
!style="background:silver; color:black" align="center" valign="center" rowspan="1"|Performance | !style="background:silver; color:black" align="center" valign="center" rowspan="1"|Performance | ||