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Specific Process Knowledge/Thin film deposition/MVD: Difference between revisions

Taran (talk | contribs)
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|style="background:LightGrey; color:black"|Batch
|style="background:LightGrey; color:black"|Batch
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|style="background:WhiteSmoke; color:black" align="center" colspan="2"|
1 sample at a time
One sample at a time


2 4" or 6" wafers may be processed simultaneously using cassettes
Two 4" or 6" wafers may be processed simultaneously using cassettes
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