Specific Process Knowledge/Thin film deposition/MVD: Difference between revisions
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[[image:Mvd.jpg|200x200px|right|thumb|The MVD is located in cleanroom 1]] | [[image:Mvd.jpg|200x200px|right|thumb|The MVD is located in cleanroom 1]] | ||
The Applied Microstructures MVD 100 system deposits molecular films on surfaces. These films serve a wide range of purposes ranging from antistiction coatings of nanoimprint lithography stamps to protecting MEMS structures. At Danchip the MVD is an essential tool for nanoimprint lithography. | The Applied Microstructures MVD 100 system deposits molecular films on surfaces. These films serve a wide range of purposes ranging from antistiction coatings of nanoimprint lithography stamps to protecting MEMS structures. At Danchip the MVD is an essential tool for nanoimprint lithography, where it is used to create antistiction coatings on the imprint stamps. | ||
'''The user manual, user APV, and contact information can be found in [http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=199 LabManager]''' | '''The user manual, user APV, and contact information can be found in [http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=199 LabManager]''' | ||