Specific Process Knowledge/Thin film deposition/MVD: Difference between revisions
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|style="background:WhiteSmoke; color:black" align="center" colspan="2"| | |style="background:WhiteSmoke; color:black" align="center" colspan="2"| | ||
1" to 8" | 1" to 8" | ||
Smaller samples may be fixed to carrier wafer | |||
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| style="background:LightGrey; color:black"|Allowed materials | | style="background:LightGrey; color:black"|Allowed materials | ||