Specific Process Knowledge/Thin film deposition/MVD: Difference between revisions
No edit summary |
|||
| Line 7: | Line 7: | ||
[[image:Mvd.jpg|200x200px|right|thumb|The MVD is located in cleanroom 1]] | [[image:Mvd.jpg|200x200px|right|thumb|The MVD is located in cleanroom 1]] | ||
The Applied Microstructures MVD 100 system deposits molecular films on surfaces. These films serve a wide range of purposes ranging from antistiction coatings of nanoimprint lithography stamps to protecting MEMS structures. At Danchip the MVD is essential for nanoimprint lithography. | The Applied Microstructures MVD 100 system deposits molecular films on surfaces. These films serve a wide range of purposes ranging from antistiction coatings of nanoimprint lithography stamps to protecting MEMS structures. At Danchip the MVD is an essential tool for nanoimprint lithography. | ||
'''The user manual, user APV, and contact information can be found in [http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach= | '''The user manual, user APV, and contact information can be found in [http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=199 LabManager]''' | ||
===Process information=== | ===Process information=== | ||