Specific Process Knowledge/Characterization/Profiler: Difference between revisions
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The newer Dektak XTA stylus profiler is usable for profiling surfaces of samples with structures in the micro- and nanometer range. | The newer Dektak XTA stylus profiler is usable for profiling surfaces of samples with structures in the micro- and nanometer range. | ||
A profil measurement can be done in a specific point by using a high magnification camera to locate the structure. It is also possible to program the stylus to measure in several positions, defined with respect to some deskew points. Stress measurements of thin films can be done by measuring the wafer bow. | A profil measurement can be done in a specific point by using a high magnification camera to locate the structure. It is also possible to program the stylus to measure in several positions, defined with respect to some deskew points. Stress measurements of thin films can be done by measuring the wafer bow. | ||
'''The user manual(s), quality control procedure(s) and results, technical information and contact information can be found in LabManager:''' | |||
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[http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&page_id=169 Dektak XTA_new in LabManager] | |||
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[[image:Dektak XTA new.JPG|275x275px|right|thumb|Dektak XTA_new: positioned in Hymite room (characterization room).]] | [[image:Dektak XTA new.JPG|275x275px|right|thumb|Dektak XTA_new: positioned in Hymite room (characterization room).]] | ||
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==Dektak 8 stylus profiler== | ==Dektak 8 stylus profiler== | ||