Specific Process Knowledge/Characterization/Thickness Measurer: Difference between revisions

@@ Line 35: / Line 35: @@
 Thickness measurer
 |style="background:WhiteSmoke; color:black"|
-*Wafer
+*Wafer thickness
 *Depths of larger grooves
 *Heigth of larger mesas
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 Thickness resolution
 |style="background:WhiteSmoke; color:black"|
-*>5 µm
+*< 5 µm
-|-
-!style="background:silver; color:black" align="center" valign="center" rowspan="2"|
-Process parameter range
-|style="background:LightGrey; color:black"|
-Process Temperature
-|style="background:WhiteSmoke; color:black"|
-*Room temperature
 |-
 |style="background:LightGrey; color:black"|Process pressure
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 | style="background:LightGrey; color:black"|Substrate materials allowed
 |style="background:WhiteSmoke; color:black"|
-*No restriction.
+*No restrictions
 |-
 |}