Specific Process Knowledge/Thermal Process/C1 Furnace Anneal-oxide: Difference between revisions
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|style="background:LightGrey; color:black"|Gas flows | |style="background:LightGrey; color:black"|Gas flows | ||
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*N<sub>2</sub>: 5 slm | *N<sub>2</sub>: 5 slm (annealing) | ||
*O<sub>2</sub>: 5 slm | *O<sub>2</sub>: 5 slm (dry oxidation) | ||
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!style="background:silver; color:black" align="center" valign="center" rowspan="2"|Substrates | !style="background:silver; color:black" align="center" valign="center" rowspan="2"|Substrates | ||