Specific Process Knowledge/Thermal Process/Furnace Noble: Difference between revisions
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==Noble furnace== | ==Noble furnace== | ||
The Noble Furnace is mostly used for annealing and oxidation of different samples. Annealing can be done in a nitrogen or argon atmosphere. Recently (Autumn 2013) a bubler has also been installed in the furnace, so it is possible to do both wet and dry oxidations. The maximum temperature of the | The Noble Furnace is mostly used for annealing and oxidation of different samples. Annealing can be done in a nitrogen or argon atmosphere. Recently (Autumn 2013) a bubler has also been installed in the furnace, so it is possible to do both wet and dry oxidations. The maximum temperature of the furnace is 1000 <sup>o</sup>C. | ||
In the Noble Furnaces more dirty samples with metal are allowed in the furnace. Different sample holder are available for wafers and smaller samples. | In the Noble Furnaces more dirty samples with metal are allowed in the furnace. Different sample holder are available for wafers and smaller samples. | ||
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The furnace is located in in service area 3. | The furnace is located in in service area 3. | ||
[[Image:Noble.JPG|thumb|300x300px| | [[Image:Noble.JPG|thumb|300x300px|Noble furnace. Positioned in service area 3]] | ||