Specific Process Knowledge/Thermal Process/Furnace Noble: Difference between revisions

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 ==Noble furnace==
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+The Noble Furnace is mostlys used for annealing and oxidation of different samples. Also more dirty samples with metal are allowed in the furnace.
+The maximum temperature of the Noble furnace is 1000 <sup>o</sup>C. The gas connections are N<sub>2</sub>, O<sub>2</sub> and argon. Recently (Autumn 2013) a bubler for wet oxidaton has also been installed on the furnace.
+The furnace is located in in service area 3.
 This furnace is used to grow oxide on metals or dirty wafers and to anneal wafers up to 1000 degree Celsius.
-The Noble furnace is located in service room 3.
 [[Image:Noble.JPG|thumb|300x300px|A1 Bor Drive-in furnace. Positioned in cleanroom 2]]
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 |style="background:LightGrey; color:black"|Gasses on the system
 |style="background:WhiteSmoke; color:black"|
-*N<sub>2</sub>:0-5 sccm
+*N<sub>2</sub>:0-5 SLM
-*O<sub>2</sub>: 0-5 sccm
+*O<sub>2</sub>: 0-5 SLM
+*Argon: 0-7 SLM
 |-
 !style="background:silver; color:black" align="center" valign="center" rowspan="2"|Substrates