Specific Process Knowledge/Characterization/Thickness Measurer: Difference between revisions
| Line 42: | Line 42: | ||
Performance | Performance | ||
|style="background:LightGrey; color:black"| | |style="background:LightGrey; color:black"| | ||
Thickness | Thickness resolution | ||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
*5 µm | *>5 µm | ||
|- | |- | ||
!style="background:silver; color:black" align="center" valign="center" rowspan="2"| | !style="background:silver; color:black" align="center" valign="center" rowspan="2"| | ||
| Line 62: | Line 62: | ||
Batch size | Batch size | ||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
*One sample | *One sample | ||
|- | |- | ||
| style="background:LightGrey; color:black"|Substrate materials allowed | | style="background:LightGrey; color:black"|Substrate materials allowed | ||
Revision as of 13:58, 13 January 2014
THIS PAGE IS UNDER CONSTRUCTION
Feedback to this page: click here
Thickness measurer
The purpose is to measure the thickness of wafers, depths of larger grooves or height of larger mesas.
Doing a KOH etch can it be helpful to insure no over etching by making a thickness measurement doing the etch.
The user manual, technical information and contact information can be found in LabManager:
Quality Control - Recipe Parameters and Limits
| Quality Control (QC) for the Thickness measurer |
|
The measured standard thickness is 0.1 mm. The measured result have to be within +- 0.005 mm. The QC is preformed ones a year. |
|
Purpose |
Thickness measurer |
|
|---|---|---|
|
Performance |
Thickness resolution |
|
|
Process parameter range |
Process Temperature |
|
| Process pressure |
| |
|
Substrates |
Batch size |
|
| Substrate materials allowed |
|
Feedback to this page: click here
This is a micrometer-screw.
It measures with an accurracy within a few µm. The range is from a few µm up to 5mm. Measure the wafer in the box next to the meter. If this is ok, then other wafers can be measured. There is a calibration device by the DEKTAK. It is calibrated at 750µm.