Specific Process Knowledge/Characterization/Thickness Measurer: Difference between revisions

From LabAdviser
Mdyma (talk | contribs)
Mdyma (talk | contribs)
Line 5: Line 5:


==Thickness measurer==
==Thickness measurer==
[[Image:??.jpg|thumb|300x300px|Thickness meassurer. Positioned in cleanroom 4]]
[[Image:Thicknessmeasurer2007.jpg|thumb|300x300px|Thickness meassurer. Positioned in cleanroom 4]]


The purpose is to measure the thickness of wafers, depths of larger grooves or height of larger mesas.  
The purpose is to measure the thickness of wafers, depths of larger grooves or height of larger mesas.  
Line 14: Line 14:


'''[http://www.labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=198 Thickness measurer]'''
'''[http://www.labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=198 Thickness measurer]'''


==Quality Control - Recipe Parameters and Limits==
==Quality Control - Recipe Parameters and Limits==

Revision as of 13:46, 13 January 2014

THIS PAGE IS UNDER CONSTRUCTION

Feedback to this page: click here

Thickness measurer

Thickness meassurer. Positioned in cleanroom 4

The purpose is to measure the thickness of wafers, depths of larger grooves or height of larger mesas.

Doing a KOH etch can it be helpful to insure no over etching by making a thickness measurement doing the etch.

The user manual, technical information and contact information can be found in LabManager:

Thickness measurer

Quality Control - Recipe Parameters and Limits

Quality Control (QC) for the Thickness measurer

The measured standard thickness is 0.1 mm. The measured result have to be within +- 0.005 mm. The QC is preformed ones a year.

Equipment performance and process related parameters

Purpose

Thickness measurer

  • Wafer
  • Depths of larger grooves
  • Heigth of larger mesas

Performance

Thickness within

  • 0.5 µm

Process parameter range

Process Temperature

  • Room temperature
Process pressure
  • 1 atm

Substrates

Batch size

  • One sample per measure
Substrate materials allowed
  • No restriction.


Feedback to this page: click here


This is a micrometer-screw.

The Thickness measurer in Cleanroom 3

It measures with an accurracy within a few µm. The range is from a few µm up to 5mm. Measure the wafer in the box next to the meter. If this is ok, then other wafers can be measured. There is a calibration device by the DEKTAK. It is calibrated at 750µm.