Specific Process Knowledge/Characterization/Thickness Measurer: Difference between revisions
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The measured standard is 0.1 mm. The measured result have to be within +- 0.005 mm. The QC is preformed ones a year. | The measured standard is 0.1 mm. The measured result have to be within +- 0.005 mm. The QC is preformed ones a year. | ||
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==Equipment performance and process related parameters== | ==Equipment performance and process related parameters== | ||