Specific Process Knowledge/Thermal Process/A1 Bor Drive-in furnace: Difference between revisions
| Line 76: | Line 76: | ||
|} | |} | ||
==Overview of the performance of the Boron | ==Overview of the performance of the Boron Drive-in + Pre-dep furnace and some process related parameters== | ||
{| border="2" cellspacing="0" cellpadding="2" | {| border="2" cellspacing="0" cellpadding="2" | ||
| Line 113: | Line 113: | ||
|style="background:LightGrey; color:black"|Batch size | |style="background:LightGrey; color:black"|Batch size | ||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
*1-30 100 | *1-30 100 mm wafers (or 50 mm wafers) per run | ||
|- | |- | ||
|style="background:LightGrey; color:black"|Substrate materials allowed | |style="background:LightGrey; color:black"|Substrate materials allowed | ||