Jump to content

Specific Process Knowledge/Characterization/Drop Shape Analyzer: Difference between revisions

← Older editNewer edit →
VisualWikitext
Taran (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab307-labadviser-users-34891
3,526 edits
Taran (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab307-labadviser-users-34891
3,526 edits
Line 24: Line 24:
|-
|-
!style="background:silver; color:black" align="left"|Performance
!style="background:silver; color:black" align="left"|Performance
|style="background:LightGrey; color:black"|Thin film materials that can be measured||style="background:WhiteSmoke; color:black"|
|style="background:LightGrey; color:black"|Measurement accuracy
Film with a refractive index of less than 2.02 and that are transparent to the light in the given wavelength range
ex:
*Silicon Oxide
*Silicon nitride
*polymers
|-
|style="background:silver; color:black"|
|style="background:LightGrey; color:black"|Film thickness range
|style="background:WhiteSmoke; color:black"|
|style="background:WhiteSmoke; color:black"|
*~1µm to 15 µm
*Highly dependent on analysis conditions (image quality and fitting model), usually around ±0.5°
|-
|style="background:silver; color:black"|
|style="background:LightGrey; color:black"|Film thickness accuracy
|style="background:WhiteSmoke; color:black"|
*±(0.5%+50Å)
|-
|style="background:silver; color:black"|
|style="background:LightGrey; color:black"|Index accuracy
|style="background:WhiteSmoke; color:black"|
*±0.001
|-
|-
!style="background:silver; color:black" align="left"|Process parameters
!style="background:silver; color:black" align="left"|Process parameters
Retrieved from "https://labadviser.nanolab.dtu.dk//index.php?title=Specific_Process_Knowledge/Characterization/Drop_Shape_Analyzer"