Specific Process Knowledge/Characterization/Drop Shape Analyzer: Difference between revisions

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==anything==

Revision as of 13:36, 10 January 2014

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The Drop Shape Analyzer

The Krüss DSA 100S Drop Shape Analyzer will analyze the shape a drop of liquid on a surface, or suspended from a needle, in order to calculate the contact angle, or the surface tension, respectively.

The Krüss DSA 100s Drop Shape Analyzer

The user manual, user APV(s), technical information, and contact information can be found in LabManager:

Drop Shape Analyzer in LabManager

An overview of the performance of the Prism Coupler

Purpose Film thickness measurements and optical characterization of optically transparent thin films
  • Measurement of film thickness
  • Optical constants
Performance Thin film materials that can be measured

Film with a refractive index of less than 2.02 and that are transparent to the light in the given wavelength range ex:

  • Silicon Oxide
  • Silicon nitride
  • polymers
Film thickness range
  • ~1µm to 15 µm
Film thickness accuracy
  • ±(0.5%+50Å)
Index accuracy
  • ±0.001
Process parameter range Wavelength range

Can operate at two different wavelength:

  • 633 nm
  • 1550 nm
Substrates Batch size
  • One sample at a time - all sample larger than 5x5 mm2sizes up to 6"
Substrate material allowed
  • In principle all materials

anything