Specific Process Knowledge/Thin film deposition/MVD: Difference between revisions
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[[image:Mvd.jpg|200x200px|right|thumb|The MVD is located in cleanroom 1]] | [[image:Mvd.jpg|200x200px|right|thumb|The MVD is located in cleanroom 1]] | ||
The Applied Microstructures MVD 100 system deposits molecular films on surfaces. These films serve a wide range of purposes ranging from antistiction coatings of nanoimprint lithography stamps to protecting MEMS structures. At Danchip the MVD is essential for nanoimprint lithography. | The Applied Microstructures MVD 100 system deposits molecular films on surfaces. These films serve a wide range of purposes ranging from antistiction coatings of nanoimprint lithography stamps to protecting MEMS structures. At Danchip the MVD is essential for nanoimprint lithography. | ||
== Processing on the MVD == | == Processing on the MVD == | ||