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Specific Process Knowledge/Thermal Process/C4 Aluminium Anneal furnace: Difference between revisions

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DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers
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Pevo (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers
2,366 edits
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*Annealing of wafers with aluminium
*Annealing of wafers with aluminium
*Oxidation of wafers with aluminium
*Oxidation of wafers with aluminium
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!style="background:silver; color:black" align="center"|Performance
|style="background:LightGrey; color:black"|Film thickness
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!style="background:silver; color:black" align="center" valign="center" rowspan="3"|Process parameter range
!style="background:silver; color:black" align="center" valign="center" rowspan="3"|Process parameter range
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