Specific Process Knowledge/Characterization/Thickness Measurer: Difference between revisions
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This is a micrometer-screw. | This is a micrometer-screw. | ||
[[image:Mikrometerskrue_hel_a.JPG|200x200px|right|thumb|The | [[image:Mikrometerskrue_hel_a.JPG|200x200px|right|thumb|The Thickness measurer in Cleanroom 3 ]] | ||
It measures with an accurracy within a few µm. | It measures with an accurracy within a few µm. | ||
Revision as of 13:12, 9 January 2008
This is a micrometer-screw.
It measures with an accurracy within a few µm. Measure the wafer in the box next to the meter.If ok other wafers can be measured. There is a calibration device by the DEKTAK. It is calibrated at 750µm