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Specific Process Knowledge/Thermal Process/A1 Bor Drive-in furnace: Difference between revisions

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DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers
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Pevo (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers
2,345 edits
Line 115: Line 115:
| style="background:LightGrey; color:black"|Substrate material allowed
| style="background:LightGrey; color:black"|Substrate material allowed
|style="background:WhiteSmoke; color:black"|
|style="background:WhiteSmoke; color:black"|
*Silicon wafers (new or RCA cleaned wafers)
*Silicon wafers (RCA cleaned)
|-  
|-  
|}
|}
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