Specific Process Knowledge/Characterization/AFM: Atomic Force Microscopy: Difference between revisions
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The main purposes are surface roughness measurements and step/structure high measurements in the nanometer and sub-micrometer regime. For larger structure see the [[Specific Process Knowledge/Characterization/Topographic measurement|topografic measurement]] page. | The main purposes are surface roughness measurements and step/structure high measurements in the nanometer and sub-micrometer regime. For larger structure see the [[Specific Process Knowledge/Characterization/Topographic measurement|topografic measurement]] page. | ||
To get some product information from the vendor take a look at Bruker's homepage [http://www.bruker-axs.com/atomicforcemicroscopy.html] (Bruker acquired Veeco's AFM business in Oct. 2010) | |||
==Process Information== | |||
For a tutorial on AFM see here: [http://www.doitpoms.ac.uk/tlplib/afm/index.php AFM] | For a tutorial on AFM see here: [http://www.doitpoms.ac.uk/tlplib/afm/index.php AFM] | ||
Free analysis software: For visualizing and analyzing AFM and Optical profiler files (Nanoman and Sensofar) [http://gwyddion.net Gwyddion] | Free analysis software: For visualizing and analyzing AFM and Optical profiler files (Nanoman and Sensofar) [http://gwyddion.net Gwyddion] | ||
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[http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=125 Nanoman in LabManager] | [http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=125 Nanoman in LabManager] | ||
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===An overview of the performance of the AFM: Nanoman=== | ===An overview of the performance of the AFM: Nanoman=== | ||