Specific Process Knowledge/Thermal Process/A1 Bor Drive-in furnace: Difference between revisions
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|style="background:LightGrey; color:black"|Film thickness||style="background:WhiteSmoke; color:black"| | |style="background:LightGrey; color:black"|Film thickness||style="background:WhiteSmoke; color:black"| | ||
*Dry oxide: 50 Å to ~2000 Å (it takes too long to grow a thicker oxide) | *Dry oxide: 50 Å to ~2000 Å (it takes too long to grow a thicker oxide) | ||
*Wet oxide | *Wet oxide: 50 Å to ~3 µm (it takes too long to grow a thicker oxide) | ||
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!style="background:silver; color:black" align="center" valign="center" rowspan="3"|Process parameter range | !style="background:silver; color:black" align="center" valign="center" rowspan="3"|Process parameter range | ||