Specific Process Knowledge/Thermal Process/A1 Bor Drive-in furnace: Difference between revisions

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 *Silicon wafers (new or RCA cleaned wafers)
-*From A2 furnace directly (e.g. incl. Predep HF)
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 | style="background:LightGrey; color:black"|Substrate material allowed
 |style="background:WhiteSmoke; color:black"|
-*Silicon wafers (new from the box or RCA cleaned)
+*Silicon wafers (only RCA cleaned)
 *In doubt: look at [http://www.labmanager.danchip.dtu.dk/view_binary.php?fileId=1250 the cross contamination chart] or send a mail to [mailto:furnace@danchip.dtu.dk the Furnace group].
 |-
 |}