Specific Process Knowledge/Back-end processing/Laser Micromachining Tool: Difference between revisions

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 {| {{table}}
 | align="left" valign="top" style="background:LightGray"|''' Material'''
+| align="left" valign="top" style="background:LightGray"|''' Pattern'''
 | align="left" valign="top"  style="background:LightGray"|''' Optics'''
 | align="left" valign="top" style="background:LightGray"|''' Frequency'''
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 |- style="background:LightGray" valign="top"
 | Silicon
+|
 | Red (1064nm/255mm)
 |
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 |- style="background:LightGray" valign="top"
 | Silicon with SiliconNitride
+|
 | Red (1064nm/255mm)
 |
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 |- style="background:LightGray" valign="top"
 | Borofloat glass
+|
 | Red (1064nm/255mm)
 |
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 |- style="background:LightGray" valign="top"
 | Nickel
+|
 | Red (1064nm/255mm)
 |
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 |- style="background:LightGray" valign="top"
 | Nickel
+| "wafer" 85mm diameter
 | Green (532nm/255mm)
 | 200 kHz
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 |- style="background:LightGray" valign="top"
 | Mask making
+|
 | Blue (355nm/103mm)
 |