Specific Process Knowledge/Thermal Process/Oxidation: Difference between revisions
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*Wet oxide with H<sub>2</sub>O in a bubbler can be grown in furnaces: C1, C3, D1, nobel. | *Wet oxide with H<sub>2</sub>O in a bubbler can be grown in furnaces: C1, C3, D1, nobel. | ||
*[[Specific Process Knowledge/Thermal Process/A1 Furnace Boron drive-in|Boron Drive-in furnace (A1)]] | *[[Specific Process Knowledge/Thermal Process/A1 Furnace Boron drive-in|Standard recipes, QC limits and results for the Boron Drive-in + Predep furnace (A1)]] | ||
*[[Specific Process Knowledge/Thermal Process/A3 Furnace Phosphorus drive-in|Standard recipes, QC limits and results for the Phosphorus Drive-in + predep furnace (A1)]] | |||
==Comparison of the six oxidation furnaces== | ==Comparison of the six oxidation furnaces== | ||