Specific Process Knowledge/Back-end processing/Laser Micromachining Tool: Difference between revisions
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The Laser Micromachining Tool is a microSTRUCT vario from the company 3D-Micromac AG. | The Laser Micromachining Tool is a microSTRUCT vario from the company 3D-Micromac AG. | ||
The system is able to produce micro structures in different kinds of materials like metals, ceramics, composite materials, etc. | The system is able to produce micro structures in different kinds of materials like metals, ceramics, composite materials, etc. | ||
Revision as of 12:49, 9 December 2013
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Laser Micromachining Tool 
The Laser Micromachining Tool is a microSTRUCT vario from the company 3D-Micromac AG.
The system is able to produce micro structures in different kinds of materials like metals, ceramics, composite materials, etc.
The machine is located in the basement of building 346 under the cleanroom.
The user manual(s), user APV(s), technical information and contact information can be found in LabManager:
The Laser Micromachining Tool in LabManager
It is equipped with 2 high power lasers:
- a 50W picosecond laser that can emit light at 3 wavelengths: 355nm, 532nm and 1064nm and a
- a 100W nanosecond laser with a wavelength of 1064nm.
It consist of these main parts:
- Upper service way
- Manual front door
- Operating panel
- Machine's feet (adjustable)
- Left service way
- Electrical cabinet
Process information
- Silicon cutting and milling
- Borofloat glass cutting and milling
- Quartz cutting and milling
- Nickel cutting and milling (for Polymer Injection Molder)
- Mask making
Laser Processing details
| Material | Optics | Intensity | Writing speed | Parameter file |
| Silicon | Red (1064nm/255mm) | 100% | ?? mm/s | silicon cutting.par |
| Silicon with SiliconNitride | Red (1064nm/255mm) | 100% | ?? mm/s | silicon-SiN cutting.par |
| Borofloat glass | Red (1064nm/255mm) | 100% | ?? mm/s | borofloat cutting.par |
| Nickel | Red (1064nm/255mm) | 100% | ?? mm/s | nickel cutting red.par |
| Nickel | Green (532nm/255mm) | 100% | ?? mm/s | nickel cutting green.par |
| Mask making | Blue (355nm/103mm) | 20% | ?? mm/s | mask making.par |