Specific Process Knowledge/Thermal Process/A1 Bor Drive-in furnace: Difference between revisions
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==Quality Control - Parameters and Limits== | ==Quality Control - Parameters and Limits== | ||
{| border="1" cellspacing="2" cellpadding="2" colspan="3" | {| border="1" cellspacing="2" cellpadding="2" colspan="3" | ||
|bgcolor="#98FB98" |'''Quality Controle (QC) for | |bgcolor="#98FB98" |'''Quality Controle (QC) for process Wet1050 and Dry1050''' | ||
|- | |- | ||
| | | | ||
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! QC Recipe: | ! QC Recipe: | ||
! Wet1050 | ! Wet1050 | ||
! Dry1050 | |||
|- | |- | ||
| H<sub>2</sub> flow | | H<sub>2</sub> flow | ||
|3 sccm | |3 sccm | ||
|0 sccm | |||
|- | |- | ||
|O<sub>2</sub> flow | |O<sub>2</sub> flow | ||
|2 sccm | |2 sccm | ||
|5 sccm | |||
|- | |- | ||
|Temperature | |Temperature | ||
|1050 C | |||
|1050 C | |1050 C | ||
|- | |- | ||
|Oxidation time | |Oxidation time | ||
|30 min | |30 min | ||
|100 min | |||
|- | |- | ||
|} | |} | ||
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{| border="2" cellspacing="1" cellpadding="2" align="center" style="width:500px" | {| border="2" cellspacing="1" cellpadding="2" align="center" style="width:500px" | ||
!QC limits | !QC limits | ||
|Thickness | |||
|Non-uniformity | |||
|- | |||
!Dry1050 | !Dry1050 | ||
|108-114 nm | |||
|3 % | |||
|- | |- | ||
!Wet1050 | |||
|286-302 nm | |286-302 nm | ||
|5 % | |5 % | ||
|- | |- | ||