Specific Process Knowledge/Thermal Process/A3 Phosphor Drive-in furnace: Difference between revisions

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 *Oxidation: look at the [[Specific Process Knowledge/Thermal Process/Oxidation|Oxidation]] page
 *Annealing: look at the [[Specific Process Knowledge/Thermal Process/Annealing|Annealing]] page
+==Quality Control - Parameters and Limits==
+{| border="1" cellspacing="2" cellpadding="2" colspan="3"
+|bgcolor="#98FB98" |'''Quality Controle (QC) for RIE1 and RIE2'''
+|-
+|
+*[http://www.labmanager.danchip.dtu.dk/d4Show.php?id=2846&mach=47 The QC procedure for Boron Furnace A1]<br>
+*[http://www.labmanager.danchip.dtu.dk/view_binary.php?fileId=1987 The newest QC data for wet and dry oxide]<br>
+{| {{table}}
+| align="center" |
+{| border="1" cellspacing="1" cellpadding="2"  align="center" style="width:200px"
+! QC Recipe:
+! Wet1050
+|-
+| H<sub>2</sub> flow
+|3 sccm
+|-
+|O<sub>2</sub> flow
+|2 sccm
+|-
+|Temperature
+|1050 C
+|-
+|Oxidation time
+|30 min
+|-
+|}
+| align="center" valign="top"|
+{| border="2" cellspacing="1" cellpadding="2" align="center" style="width:500px"
+!QC limits
+!Wet1050
+!Dry1050
+|-
+|Thickness
+|108-114 nm
+|286-302 nm
+|-
+|Non-uniformity
+|3 %
+|5 %
+|-
+|}
+|-
+|}
+|}
 ==Overview of the performance of the phosphorus drive-in furnace and some process related parameters==