Specific Process Knowledge/Characterization/Topographic measurement: Difference between revisions
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*Confocal (depending on objective): 1nm -> 50nm | *Confocal (depending on objective): 1nm -> 50nm | ||
|<1Å - accuracy better than 2% | |<1Å - accuracy better than 2% | ||
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!'''Max. scan depth [µm] (as a function of trench width W''') | |||
|1.2*(W[µm]-5µm) | |||
|1.2*(W[µm]-5µm) | |||
|Depending on material and trench width: | |||
*Somewhere between 1:1 and 1:12 | |||
|~1:1 with standard cantilever. | |||
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!'''Tip radius''' | |||
|5 µm 45<sup>o</sup> cone | |||
|5 µm 45<sup>o</sup> cone | |||
|No tip - using light | |||
*Blue monochromatic LED: 460nm | |||
*White broadband LED: 550nm | |||
|<12 nm on standard cantilever | |||
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!'''Stress measurement''' | |||
|Can be done | |||
|Can be done | |||
|No stress calculation capability | |||
|Cannot be done | |||
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!'''Surface roughness''' | |||
|Can be done on a line scan | |||
|Can be done on a line scan | |||
|Can be done on a line or an area | |||
|Can be done on a selected surface area | |||
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